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Micro Gas Mass Flow Meter, 100-5000sccm/1-100SLPM

Micro Gas Mass Flow Meter, 100-5000sccm/1-100SLPM
Micro Gas Mass Flow Meter, 100-5000sccm/1-100SLPM
Micro Gas Mass Flow Meter, 100-5000sccm/1-100SLPM
Micro Gas Mass Flow Meter, 100-5000sccm/1-100SLPM
Micro Gas Mass Flow Meter, 100-5000sccm/1-100SLPM
from
$788.88
Ex Tax: $788.88
  • Stock: In Stock
  • Model: RDDLZ-FLOW-MFM
  • Weight: 1.00
  • SKU: RDDLZ-FLOW-MFM

Available Options

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The micro gas mass flow meter is designed for testing gases like air, CO2, N2, O2, and Ar. It offers RS485 communication or analog voltage output (0.5-4.5V DC). With a 50:1 range ratio, it provides ±(2.0 + 0.5 FS) accuracy (0.8%) and 0.80% repeatability. The meter also features zero stability of ±0.1% FS and minimal output drift of ±0.12%/°C. 

Specification

Model Selection

ModelMechanical ConnectionMax Flow Rate
RDDLZ-MF4701N1-NPT 1/8" internal thread100, 200, 500 sccm
RDDLZ-MF4703N1-NPT 1/8" internal thread1, 2, 5 SLPM or 1000, 2000, 5000 sccm
RDDLZ-MF4708N3-NPT 3/8" internal thread10, 20, 50 SLPM
RDDLZ-MF4710G4-G1/2" internal thread100 SLPM

Please contact us if you need other specifications.

Technical Parameters

Gas MediumAir/CO2/N2/O2/Ar (optional)
Range Ratio50:1
Accuracy±(2.0 + 0.5 FS) 0.8%
Repeatability0.80%
Zero Stability±0.1% FS
Output Drift±0.12%/°C
Corresponding Time10 (Default, can be set to 20, 50, 100, 500, 1000)
Power Supply8~24V DC, 50mA
Output MethodLinearity: RS485/Analog voltage output (0.5~4.5V DC)
Display4-digit 7-segment LED display, 2 indicators
Instantaneous Flow Unitsccm or SLPM
Cumulative Flow Unitsccm corresponds to scc or SL, SLPM corresponds to SL or Nm3
Instantaneous Flow Resolution100, 200, 500 sccm: 0.1 or 1 sccm (default: 1 sccm)
1000, 2000, 5000 sccm: 1 sccm
1, 2, 5 SLPM: 0.001, 0.01, 0.1, or 1 SLPM (default: 0.01 SLPM)
10, 20, 50 SLPM: 0.01, 0.1 or 1 SLPM (default: 0.1 SLPM)
100, 200 SLPM: 0.1 or 1 SLPM (default: 1 SLPM)
Cumulative Flow ResolutionMaximum Flow 100~5000 sccm: 0.1 sccm or 0.01 SL
Maximum Flow 1~1000 SLPM: 0.1 SL or 0.01 Nm3
Cumulative Flow MaximumMaximum Flow 100~5000 sccm: 9999999.9 scc or 999999.99 SL
Maximum Flow 1~1000 SLPM: 9999999.9 SL or 999999.99 Nm3
Maximum Working Pressure≤1.0 MPa
Environmental TemperatureOperating: -10°C~+55°C; Storage: -20°C~+65°C
Humidity≤ 95% RH (No freezing, no condensation)
Mechanical InterfaceNPT or BSPT internal thread
KeyboardThree buttons
Electrical InterfaceCDR-5
Standard Calibration GasAir (20°C, 101.325 kPa)


Feature

  • High Accuracy: Thermal mass flow sensing ensures precise measurements without needing temperature or pressure compensation.
  • Wide Flow Range: Offers a 50:1 flow range, from 100 sccm to 5000 sccm (1 SLPM to 100 SLPM).
  • Multi-Sensor Integration: Combines multiple sensors in a single chip for improved performance and compact design.
  • Flexible Outputs: Provides digital communication or linear analog voltage output, and can be queried by a host computer.
  • Real-Time Display: LED display shows instantaneous flow and total accumulated flow.
  • Flow Recordings: Records maximum and minimum flow values since power-on.
  • Over-range Alert: Alerts when the flow exceeds the meter’s capacity.
  • RS485 Communication: Includes an RS485 module for remote control and data transfer.
  • Standard Gas Path Interface: Uses standard gas connectors, compatible with traditional flow meters.
  • Customizable Dimensions: Custom mechanical sizes and flow ranges available based on customer needs.

Dimension (unit: mm)

ModelLBH1H2H3H42-N
RDDLZ-MF4701/RDDLZ-MF47039824432920102-NPT 1/8
RDDLZ-MF47089824473324122-NPT 3/8
RDDLZ-MF471011830533930152-G 1/2


Detail

Tips: How does the meter compare to traditional flow meters?

Compared to traditional mechanical flow meters, such as rotameters or turbine meters, the Micro Gas Mass Flow Meter offers several advantages. First, it provides much higher accuracy and repeatability, particularly at low flow rates. Traditional flow meters often require calibration for each specific gas type, whereas the Micro Gas Mass Flow Meter can measure a wide range of gases without the need for such adjustments.

Additionally, the thermal mass flow technology used in this meter does not require temperature or pressure compensation, which simplifies operation and reduces the need for complex calibration procedures. The meter’s digital and analog outputs also offer more flexibility in integration with modern control systems.

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